Name: Feature Profile Evolution in Plasma Processing Using On-wafer Monitoring System
Price: 614.95 DKK
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Author: Seiji Samukawa
ISBN: 9784431547945

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Bag om Feature Profile Evolution in Plasma Processing Using On-wafer Monitoring System

Three types of sensors are introduced: on-wafer UV sensors, on-wafer charge-up sensors and on-wafer sheath-shape sensors in the plasma processing and prediction system of real etching profiles based on monitoring data.

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Sprog:
Engelsk

ISBN:
9784431547945

Forlag:
Springer Verlag, Japan

Indbinding:
Paperback

Sideantal:
40

Udgivet:
17. februar 2014

Udgave:
2014

Størrelse:
155x235x0 mm.

Vægt:
949 g.

Leveringstid: 8-11 hverdage.
Forventet levering: 6. marts 2025

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Three types of sensors are introduced: on-wafer UV sensors, on-wafer charge-up sensors and on-wafer sheath-shape sensors in the plasma processing and prediction system of real etching profiles based on monitoring data.

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