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856,95 kr.

Bag om Handbook of VLSI Microlithography

Offers a look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings - including optical lithography, electron beam, ion beam, and x-ray lithography.

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Sprog:
Engelsk

ISBN:
9780815512813

Forlag:
William Andrew Publishing

Indbinding:
Hardback

Sideantal:
680

Udgivet:
19. juli 2010

Størrelse:
152x229x0 mm.

Vægt:
1030 g.

Leveringstid: 2-3 uger.
Forventet levering: 13. december 2024

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Beskrivelse af Handbook of VLSI Microlithography

Offers a look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings - including optical lithography, electron beam, ion beam, and x-ray lithography.

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