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Handbook of VLSI Microlithography - Bog

- Principles, Technology and Applications

Bag om Handbook of VLSI Microlithography

Offers a look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings - including optical lithography, electron beam, ion beam, and x-ray lithography.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9780815512813
  • Indbinding:
  • Hardback
  • Sideantal:
  • 680
  • Udgivet:
  • 19. Juli 2010
  • Størrelse:
  • 152x229x0 mm.
  • Vægt:
  • 1030 g.
  • 2-3 uger.
  • 22. Oktober 2024

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Medlemspris

Prøv i 30 dage for 45 kr.
Herefter fra 79 kr./md. Ingen binding.

Beskrivelse af Handbook of VLSI Microlithography

Offers a look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings - including optical lithography, electron beam, ion beam, and x-ray lithography.

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