Name: Materials and Failures in MEMS and NEMS
Price: 1812.95 DKK
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Author: A Tiwari
ISBN: 9781119083603

Materials and Failures in MEMS and NEMS af A Tiwari

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The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the hurdles in fabrication or manufacturing process.

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Sprog:
Engelsk

ISBN:
9781119083603

Forlag:
John Wiley & Sons Inc

Indbinding:
Hardback

Sideantal:
432

Udgivet:
28. September 2015

Størrelse:
185x262x28 mm.

Vægt:
934 g.

Leveringstid: Ukendt - mangler pt..

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The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the hurdles in fabrication or manufacturing process.

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