Photonic MEMS Devices - Ai-Qun Liu - Bog

With a scope beyond traditional design and analysis, Photonic MEMS Devices introduces this research field, covering all aspects of engineering innovation, design, modeling, fabrication, control, and experimental implementation of devices. Building on the existing body of literature, this book presents new MEMS approaches on the micro- and nanoscale. Detailed descriptions of various photonic MEMS devices, such as tunable lasers, injection locked lasers, and light tuning switches, appear throughout the text along with actual experimental results. The text also describes different photonic MEMS systems including devices with both component- and system-level photonic integration.