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Chemical-mechanical polishing (CMP) is a critical technology in the planarization of multilevel metallization systems and shallow-trench isolation in semiconductor manufacturing. This book, first published in 2001, provides an insight into the fundamental processes in CMP. Presentations from academia, government institutions and industry are featured.
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Electric or magnetic tunability of RF and microwave devices is desirable for a variety of civilian and military applications. Tremendous advances have been made in thin-film processing, in particular with metal-oxide thin films. This book, first published in 2000, serves as a reference for researchers and contributes to breakthroughs in basic and applied research in this field.
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
This book published by MRS, brings together a group of internationally recognized experts in the field to discuss progress in materials, physics, processing and device design and performance. Developments in materials for cooled and uncooled infrared systems based on pyroelectric, micro-bolometric, photovoltaic and photoconductive detectors are emphasized.
This book shares research and highlights the importance of materials in energy conversion technologies. Topics include: rechargeable batteries; lithium-ion rechargeable batteries - modelling; fuel cells; lithium-ion rechargeable batteries - cathode materials; battery electrolytes, interfaces and passive films; lithium-ion rechargeable batteries - anode materials and supercapacitors.
Heterogeneous catalysis is undergoing a dramatic change driven by the need to develop more efficient catalyst systems for the production of specialty chemicals and the development of new high-tech materials. In this book, first published in 1998, scientists from very different disciplines have made contributions and brought insights to the field.
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. In addition to traditional themes of synthesis, structure and optoelectronic properties of nano- and microcrystalline semiconductors, this book, first published in 1999, reports on properties leading to new optical and biological applications.
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
This volume includes sixty-eight papers presented at 'Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2011' symposium, 2011 MRS Spring Meeting. The symposium covered the science and technology of thin-film silicon-based materials, reviewed recent progress and addressed the scientific and technical issues in the field.
'Functional Two-Dimensional Layered Materials', held at the April 2011 MRS Spring Meeting (San Francisco, California) was the first MRS symposium focusing on graphene, topological insulator thin films and other 2D and quasi-2D materials together, highlighting breakthroughs, progress and challenges in the synthesis, processing, structure and assembly of 2D layered materials.
Titanium dioxide nanomaterials have been showing very promising applications in many fields. More than 160 papers, presentations and posters were accepted in Symposium GG, 'Titanium Dioxide Nanomaterials', at 2011 MRS Spring Meeting. This volume includes selected papers which cover the synthesis, properties and applications of titanium dioxide nanomaterials.
Symposium II, 'Ion Beams - New Applications from Mesoscale to Nanoscale', was held at the 2011 MRS Spring Meeting, April 25-29, in San Francisco, California. This symposium welcomed presentations on ion-beam engineering and characterization of materials properties, structure, topography and functionality, spanning dimensions from the mesoscale to the nanoscale.
This volume includes a collection of papers presented at the MRS Symposium TT, 'Laser-Material Interactions at Micro/Nanoscales'. This symposium provided an interdisciplinary forum for scientists and engineers from different fields to discuss the physical, chemical, thermal and mechanical phenomena that occur during laser-material interactions at micro and nano scales.
For almost two decades now, the carbon nanomaterial (CNM) system has persistently provided researchers the opportunity for spectacular new discoveries, significant advances in fundamental and applied science, and the development of disruptive technologies and applications. These exciting developments and others are covered in this volume.
There were eleven symposia conducted with a focus on biomaterials under the sub-class of 'Biomaterials and Soft Matter' at the MRS 2013 fall meeting. Symposia H, C, D and J have been combined into this proceedings volume.
This publication presents papers from Symposium 8A, 'Cultural Heritage and Archaeological Issues in Materials Science (CHARIMSc)', of the XXII International Materials Research Congress (IMRC) held in Cancun, Quintana Roo, Mexico in August 2013.
The 37th International Symposium on the Scientific Basis for Nuclear Waste Management was held in Barcelona, September-October, 2013.
Symposium K and Symposium RR were held April 21-25 at the 2014 MRS Spring Meeting. This symposium proceedings volume represents the recent advances in various areas of deposition, processing, characterization and integration of functional oxide materials, with particular emphasis on the relationship among the structure, composition, stability and functional properties.
The XXIII International Materials Research Congress was held on August 17-21, 2014, in Cancun, Mexico. It was organized by the Sociedad Mexicana de Materiales (SMM). About 1,500 specialized scientists from more than 40 countries participated in the 30 different symposia, workshops, plenary lectures and tutorial courses.
Symposium M, 'Materials and Technology for Nonvolatile Memories', was held November 30-December 5 at the 2014 MRS Fall Meeting in Boston, Massachusetts, which was a follow up of previous symposia on nonvolatile memories. This volume represents the recent advances and related material issues on various kinds of nonvolatile memory technologies.
Symposium EE, entitled 'Scientific Basis for Nuclear Waste Management XXXVIII', was held from 30 November to 5 December 2014, 2014, at the MRS Fall Meeting in Boston. The symposium attracted 85 abstracts. This proceedings volume contains 31 papers from the meeting.
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