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Micromachined Ultrasound-Based Proximity Sensors presents a packaged ultrasound microsystem for object detection and distance metering based on micromachined silicon transducer elements. The micromachined silicon transducer elements were fabricated using industrial IC technology combined with standard silicon micromachining techniques.
Micromachined Ultrasound-Based Proximity Sensors presents a packaged ultrasound microsystem for object detection and distance metering based on micromachined silicon transducer elements. The micromachined silicon transducer elements were fabricated using industrial IC technology combined with standard silicon micromachining techniques.
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