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Modeling of Chemical Vapor Deposition of Tungsten Films - Christoph Werner - Bog

Bag om Modeling of Chemical Vapor Deposition of Tungsten Films

Semiconductor equipment modeling has in recent years become a field of great interest, because it offers the potential to support development and optimization of manufacturing equipment and hence reduce the cost and improve the quality of the reactors.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9783034877435
  • Indbinding:
  • Paperback
  • Sideantal:
  • 139
  • Udgivet:
  • 23. maj 2013
  • Udgave:
  • 11993
  • Størrelse:
  • 229x152x7 mm.
  • Vægt:
  • 215 g.
  • 8-11 hverdage.
  • 13. november 2024

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Beskrivelse af Modeling of Chemical Vapor Deposition of Tungsten Films

Semiconductor equipment modeling has in recent years become a field of great interest, because it offers the potential to support development and optimization of manufacturing equipment and hence reduce the cost and improve the quality of the reactors.

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