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Doping Engineering for Front-End Processing: Volume 1070 - Bog

Bag om Doping Engineering for Front-End Processing: Volume 1070

The volume focuses on many aspects related to doping of semiconductors (Si, SiGe and Ge) for device fabrication, and explores areas for single-gate as well as multi-gate devices with planar and vertical architectures. Surface properties, coverage, bonding saturation and passivation, and annealing ambient are also discussed.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9781605110400
  • Indbinding:
  • Hardback
  • Sideantal:
  • 319
  • Udgivet:
  • 17. oktober 2008
  • Størrelse:
  • 228x152x23 mm.
  • Vægt:
  • 568 g.
  • 8-11 hverdage.
  • 15. januar 2025
Forlænget returret til d. 31. januar 2025
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Beskrivelse af Doping Engineering for Front-End Processing: Volume 1070

The volume focuses on many aspects related to doping of semiconductors (Si, SiGe and Ge) for device fabrication, and explores areas for single-gate as well as multi-gate devices with planar and vertical architectures. Surface properties, coverage, bonding saturation and passivation, and annealing ambient are also discussed.

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