Effect of Disorder and Defects in Ion-Implanted Semiconductors: Optical and Photothermal Characterization - Bog

Focusing on the physics of the annealing kinetics of the damaged layer, this book presents an overview of characterization techniques and a comparison of the information on annealing kinetics. It also provides basic knowledge of ion implantation-induced defects; focuses on physical mechanisms of defect annealing; and more.