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This book presents a comprehensive review on the state of the art and future prospects of femtosecond laser processing for fabrication of microfluidics and optofludics including principle of femtosecond laser processing, detailed fabrication procedures of each microcomponent and practical applications to biochemical analysis.
Provides an overview of 3D femtosecond laser direct writing technology. This book highlight its potential for fabrication of complex smart microsystems by furnishing some examples of fabrication and hybrid integration of microfluidics, micromechanics, photonics, and electronics.
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