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Fundamental Electron Interactions with Plasma Processing Gases - Loucas G. Christophorou - Bog

Bag om Fundamental Electron Interactions with Plasma Processing Gases

The primary electron-molecule interaction processes of elastic and in elastic electron scattering, electron-impact ionization, electron-impact dissociation, and electron attachment are discussed, and state-of-the art authoritative data on the cross sections of these processes as well as on rate and transport coefficients are provided.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9780306480379
  • Indbinding:
  • Hardback
  • Sideantal:
  • 781
  • Udgivet:
  • 31. december 2003
  • Udgave:
  • 2004
  • Størrelse:
  • 235x155x43 mm.
  • Vægt:
  • 2850 g.
  • 8-11 hverdage.
  • 7. december 2024

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  • BLACK NOVEMBER

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Beskrivelse af Fundamental Electron Interactions with Plasma Processing Gases

The primary electron-molecule interaction processes of elastic and in elastic electron scattering, electron-impact ionization, electron-impact dissociation, and electron attachment are discussed, and state-of-the art authoritative data on the cross sections of these processes as well as on rate and transport coefficients are provided.

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