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Physical Design and Mask Synthesis for Directed Self-Assembly Lithography - Seongbo Shim - Bog
indgår i NanoScience and Technology serien
- Indbinding:
- Paperback
- Sideantal:
- 138
- Udgivet:
- 8. februar 2019
- Udgave:
- 12018
- Størrelse:
- 155x235x0 mm.
- Vægt:
- 454 g.
- 8-11 hverdage.
- 6. december 2024
Normalpris
-
BLACK NOVEMBER
Medlemspris
Prøv i 30 dage for 45 kr.
Herefter fra 79 kr./md. Ingen binding.
Herefter fra 79 kr./md. Ingen binding.
Beskrivelse af Physical Design and Mask Synthesis for Directed Self-Assembly Lithography
This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification.
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