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Physical Design and Mask Synthesis for Directed Self-Assembly Lithography - Seongbo Shim - Bog

af Seongbo Shim, Youngsoo Shin

indgår i NanoScience and Technology serien

Physical Design and Mask Synthesis for Directed Self-Assembly Lithography af Seongbo Shim
Bag om Physical Design and Mask Synthesis for Directed Self-Assembly Lithography

This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9783030094553
  • Indbinding:
  • Paperback
  • Sideantal:
  • 138
  • Udgivet:
  • 8. Februar 2019
  • Udgave:
  • 12018
  • Størrelse:
  • 155x235x0 mm.
  • Vægt:
  • 454 g.
  • 2-3 uger.
  • 18. Juni 2024

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Prøv i 30 dage for 45 kr.
Herefter fra 79 kr./md. Ingen binding.

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Beskrivelse af Physical Design and Mask Synthesis for Directed Self-Assembly Lithography

This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification.

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