Name: Physics of Submicron Lithography
Price: 2285.95 DKK
Availability: InStock
Author: Kamil A. Valiev
ISBN: 9780306435782

Physics of Submicron Lithography af Kamil A. Valiev

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In this method the device is imaged as a pattern on a metal film that has been deposited onto a transparent substrate and by means of a broad stream of light is transferred to a semiconductor wafer within which the physical structure of the devices and the integrated circuit connections are formed layer by layer.

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Sprog:
Engelsk

ISBN:
9780306435782

Forlag:
Springer Science+Business Media

Indbinding:
Hardback

Sideantal:
493

Udgivet:
31. marts 1992

Udgave:
1992

Størrelse:
254x178x25 mm.

Vægt:
2600 g.

Leveringstid: 8-11 hverdage.
Forventet levering: 28. november 2024

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Beskrivelse af Physics of Submicron Lithography

In this method the device is imaged as a pattern on a metal film that has been deposited onto a transparent substrate and by means of a broad stream of light is transferred to a semiconductor wafer within which the physical structure of the devices and the integrated circuit connections are formed layer by layer.

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