Name: Rapid Thermal Processing of Semiconductors
Price: 2545.95 DKK
Availability: InStock
Author: Peter J. Hesketh
ISBN: 9780306450549

Rapid Thermal Processing of Semiconductors af Peter J. Hesketh

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2.545,95 kr.

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Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions.

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Sprog:
Engelsk

ISBN:
9780306450549

Forlag:
Springer Science+Business Media

Indbinding:
Hardback

Sideantal:
358

Udgivet:
1. maj 1997

Udgave:
1997

Størrelse:
254x178x26 mm.

Vægt:
2090 g.

Leveringstid: 8-11 hverdage.
Forventet levering: 28. november 2024

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Beskrivelse af Rapid Thermal Processing of Semiconductors

Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions.

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