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Rapid Thermal Processing of Semiconductors - Peter J. Hesketh - Bog

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Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9780306450549
  • Indbinding:
  • Hardback
  • Sideantal:
  • 358
  • Udgivet:
  • 1. maj 1997
  • Udgave:
  • 1997
  • Størrelse:
  • 254x178x26 mm.
  • Vægt:
  • 2090 g.
  • 8-11 hverdage.
  • 16. januar 2025

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Prøv i 30 dage for 45 kr.
Herefter fra 79 kr./md. Ingen binding.

Beskrivelse af Rapid Thermal Processing of Semiconductors

Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions.

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