Name: Rapid Thermal Processing of Semiconductors
Price: 2427.95 DKK
Availability: InStock
Author: Peter J. Hesketh
ISBN: 9781489918062

Rapid Thermal Processing of Semiconductors af Peter J. Hesketh

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Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions.

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Sprog:
Engelsk

ISBN:
9781489918062

Forlag:
Springer-Verlag New York Inc.

Indbinding:
Paperback

Sideantal:
358

Udgivet:
20. juni 2013

Udgave:
11997

Størrelse:
234x156x20 mm.

Vægt:
587 g.

Leveringstid: 8-11 hverdage.
Forventet levering: 28. november 2024

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Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions.

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