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Semiconductor Lithography - Wayne M. Moreau - Bog

- Principles, Practices, and Materials

Bag om Semiconductor Lithography

In fabricating a semiconductor device such as a transistor, a series of hot processes consisting of vacuum film deposition, oxidations, and dopant implantation are all patterned into microscopic circuits by the wet processes of lithography.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9781461282280
  • Indbinding:
  • Paperback
  • Sideantal:
  • 952
  • Udgivet:
  • 22. februar 2012
  • Udgave:
  • 11988
  • Størrelse:
  • 244x170x48 mm.
  • Vægt:
  • 1606 g.
  • 8-11 hverdage.
  • 16. januar 2025

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Beskrivelse af Semiconductor Lithography

In fabricating a semiconductor device such as a transistor, a series of hot processes consisting of vacuum film deposition, oxidations, and dopant implantation are all patterned into microscopic circuits by the wet processes of lithography.

Brugerbedømmelser af Semiconductor Lithography



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