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Silicon Anodization as a Structuring Technique - Alexey Ivanov - Bog

- Literature Review, Modeling and Experiments

Bag om Silicon Anodization as a Structuring Technique

Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9783658192372
  • Indbinding:
  • Paperback
  • Sideantal:
  • 316
  • Udgivet:
  • 22. september 2017
  • Udgave:
  • 12018
  • Vægt:
  • 4497 g.
  • 8-11 hverdage.
  • 10. december 2024
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Forlænget returret til d. 31. januar 2025

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Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime.

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