Name: Silicon Micromachining
Price: 824.95 DKK
Availability: InStock
Author: M. (University of Twente Elwenspoek
ISBN: 9780521607674

Silicon Micromachining af M. (University of Twente Elwenspoek

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824,95 kr.

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This comprehensive book provides an overview of the key techniques used in the fabrication of micron-scale structures in silicon. It is a blend of detailed experimental and theoretical material, and will be of great interest to graduate students and researchers in electrical engineering and materials science whose work involves the study of micro-electromechanical systems (MEMS).

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Sprog:
Engelsk

ISBN:
9780521607674

Forlag:
Cambridge University Press

Indbinding:
Paperback

Sideantal:
420

Udgivet:
19. august 2004

Størrelse:
189x247x22 mm.

Vægt:
773 g.

Leveringstid: 8-11 hverdage.
Forventet levering: 9. december 2024

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This comprehensive book provides an overview of the key techniques used in the fabrication of micron-scale structures in silicon. It is a blend of detailed experimental and theoretical material, and will be of great interest to graduate students and researchers in electrical engineering and materials science whose work involves the study of micro-electromechanical systems (MEMS).

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