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Temperature Measurement during Millisecond Annealing - Denise Reichel - Bog

- Ripple Pyrometry for Flash Lamp Annealers

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Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9783658113872
  • Indbinding:
  • Paperback
  • Sideantal:
  • 112
  • Udgivet:
  • 8. januar 2016
  • Udgave:
  • 12015
  • Størrelse:
  • 210x148x8 mm.
  • Vægt:
  • 1906 g.
  • 8-11 hverdage.
  • 16. december 2024
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Forlænget returret til d. 31. januar 2025

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Beskrivelse af Temperature Measurement during Millisecond Annealing

Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing.

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