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Advanced Materials for Interconnections - Th. (Zentrum fur Mikrotechnologien Gessner - Bog

Bag om Advanced Materials for Interconnections

Contains chapter related to Metallization that discusses cluster equipment for IC manufacturing, copper advanced technology, gap filling, mechanical reliability, deposition technology, electroless and electro-plating, copper metallization copper interconnects and patterning of aluminum. This book also covers Process Integration.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9780444205070
  • Indbinding:
  • Hardback
  • Sideantal:
  • 460
  • Udgivet:
  • 18. december 1997
  • Størrelse:
  • 152x229x0 mm.
  • Vægt:
  • 1130 g.
  • 2-4 uger.
  • 1. februar 2025

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Medlemspris

Prøv i 30 dage for 45 kr.
Herefter fra 79 kr./md. Ingen binding.

Beskrivelse af Advanced Materials for Interconnections

Contains chapter related to Metallization that discusses cluster equipment for IC manufacturing, copper advanced technology, gap filling, mechanical reliability, deposition technology, electroless and electro-plating, copper metallization copper interconnects and patterning of aluminum. This book also covers Process Integration.

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