Artificial gravity, centrifugal force and wafer planarization - Kung Linliu - Bog

Innovation and invention are the important and key essential elements to improve the present technique and develop the new material or process, then file patents to protect the intellectual property (IP). In fact, those new or cheap technologies will replace old and obsolete technologies. However, the environmental factors may become essential and necessary, knowing the pros and cons of various technologies, the availability and inability of a wide range of materials, understanding the trends in industries and knowing the needs of business and industry is what the authors hope that readers can get more inspiration from this book.This book is written in a way that to explain inter layer dielectric or ILD such as BPSG (boro-phospho-silicate glass) planarization process improvement using artificial gravity or centrifugal force applied to the silicon wafer by the key invention of the author of this book.