Chemical-Mechanical Planarization of Semiconductor Materials

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This book contains a comprehensive review of CMP (Chemical-Mechanical Planarization) technology, one of the most exciting areas in the field of semiconductor technology. The leading edge issues of damascene and new dielectrics as well as slurryless technology are discussed.

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Sprog:
Engelsk

ISBN:
9783540431817

Forlag:
Springer-Verlag Berlin and Heidelberg GmbH & Co. KG

Indbinding:
Hardback

Sideantal:
428

Udgivet:
26. januar 2004

Udgave:
2004

Størrelse:
155x235x26 mm.

Vægt:
1760 g.

Leveringstid: 8-11 hverdage.
Forventet levering: 6. marts 2025

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Beskrivelse af Chemical-Mechanical Planarization of Semiconductor Materials

This book contains a comprehensive review of CMP (Chemical-Mechanical Planarization) technology, one of the most exciting areas in the field of semiconductor technology. The leading edge issues of damascene and new dielectrics as well as slurryless technology are discussed.

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