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CMOS Cantilever Sensor Systems - D. Lange - Bog

- Atomic Force Microscopy and Gas Sensing Applications

Bag om CMOS Cantilever Sensor Systems

This book is intended for scientists and engineers in the field of micro- and nano electro-mechanical systems (MEMS and NEMS) and introduces the development of cantilever-based sensor systems using CMOS-compatible micromachining from the design concepts and simulations to the prototype.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9783642077289
  • Indbinding:
  • Paperback
  • Sideantal:
  • 142
  • Udgivet:
  • 3. december 2010
  • Udgave:
  • 12002
  • Størrelse:
  • 234x156x8 mm.
  • Vægt:
  • 248 g.
  • 8-11 hverdage.
  • 22. november 2024
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  • BLACK NOVEMBER

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Beskrivelse af CMOS Cantilever Sensor Systems

This book is intended for scientists and engineers in the field of micro- and nano electro-mechanical systems (MEMS and NEMS) and introduces the development of cantilever-based sensor systems using CMOS-compatible micromachining from the design concepts and simulations to the prototype.

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