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Fundamental Principles of Optical Lithography - Chris (Lithoguru.com) Mack - Bog

- The Science of Microfabrication

af Chris (Lithoguru.com) Mack
Fundamental Principles of Optical Lithography af Chris (Lithoguru.com) Mack
Bag om Fundamental Principles of Optical Lithography

Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9780470727300
  • Indbinding:
  • Paperback
  • Sideantal:
  • 544
  • Udgivet:
  • 16. November 2007
  • Størrelse:
  • 247x174x29 mm.
  • Vægt:
  • 916 g.
  • 2-3 uger.
  • 24. Juli 2024

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Medlemspris

Prøv i 30 dage for 45 kr.
Herefter fra 79 kr./md. Ingen binding.

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Beskrivelse af Fundamental Principles of Optical Lithography

Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.

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