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  4. Handbook of Microlithography, Micromachining, and Microfabrication, Volume 1

Handbook of Microlithography, Micromachining, and Microfabrication, Volume 1 - P. Rai-Choudhury - Bog

- Microlithography

af P. Rai-Choudhury

indgår i Press Monographs serien

Handbook of Microlithography, Micromachining, and Microfabrication, Volume 1af P. Rai-Choudhury
Bag om Handbook of Microlithography, Micromachining, and Microfabrication, Volume 1

The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. This volume contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9780819497864
  • Indbinding:
  • Paperback
  • Sideantal:
  • 776
  • Udgivet:
  • 30. Marts 1997
  • Størrelse:
  • 152x229x0 mm.
  • Vægt:
  • 1380 g.
  • Ukendt - mangler pt..

Normalpris

Medlemspris

Prøv i 30 dage for 45 kr.
Herefter fra 79 kr./md. Ingen binding.

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Beskrivelse af Handbook of Microlithography, Micromachining, and Microfabrication, Volume 1

The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. This volume contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook.

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