Name: Laser Heat-Mode Lithography
Price: 1153.95 DKK
Availability: InStock
Author: Jingsong Wei
ISBN: 9789811509421

Laser Heat-Mode Lithography af Jingsong Wei

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This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applications.

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Sprog:
Engelsk

ISBN:
9789811509421

Forlag:
Springer Verlag, Singapore

Indbinding:
Hardback

Sideantal:
208

Udgivet:
29. november 2019

Udgave:
12019

Størrelse:
155x235x0 mm.

Vægt:
506 g.

Leveringstid: 8-11 hverdage.
Forventet levering: 29. november 2024

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This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applications.

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