Name: Modelling of Microfabrication Systems
Price: 1678.95 DKK
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Author: Raja Nassar
ISBN: 9783642055362

Modelling of Microfabrication Systems af Raja Nassar

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This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.

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Sprog:
Engelsk

ISBN:
9783642055362

Forlag:
Springer-Verlag Berlin and Heidelberg GmbH & Co. KG

Indbinding:
Paperback

Sideantal:
270

Udgivet:
7. december 2010

Udgave:
12003

Størrelse:
234x156x14 mm.

Vægt:
433 g.

Leveringstid: 8-11 hverdage.
Forventet levering: 7. december 2024

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This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.

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