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Principles of Lithography - Harry J. Levinson - Bog

af Harry J. Levinson

indgår i Press Monographs serien

Principles of Lithography af Harry J. Levinson
Bag om Principles of Lithography

This newest edition of Principles of Lithography reflects the continuing advancement of lithographic technology. In recent years, certain topics, such as line-edge roughness (LER), multi-electron-beam writers, have become more significant to practicing lithographers. As such extensive treatments of these topics are provided.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9781510627604
  • Indbinding:
  • Hardback
  • Sideantal:
  • 630
  • Udgivet:
  • 30. Juli 2019
  • Udgave:
  • 4
  • Størrelse:
  • 262x185x31 mm.
  • Vægt:
  • 1422 g.
  • Ukendt - mangler pt..

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Beskrivelse af Principles of Lithography

This newest edition of Principles of Lithography reflects the continuing advancement of lithographic technology. In recent years, certain topics, such as line-edge roughness (LER), multi-electron-beam writers, have become more significant to practicing lithographers. As such extensive treatments of these topics are provided.

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