Simulation of Etching in Chlorine Discharges Using an Integrated Feature Evolution-Plasma Model - Bog

The NASA Technical Reports Server (NTRS) houses half a million publications that are a valuable means of information to researchers, teachers, students, and the general public. These documents are all aerospace related with much scientific and technical information created or funded by NASA. Some types of documents include conference papers, research reports, meeting papers, journal articles and more. This is one of those documents.