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Low Pressure Plasmas and Microstructuring Technology - Gerhard Franz - Bog

Bag om Low Pressure Plasmas and Microstructuring Technology

Over the last forty years, plasma supported processes have attracted ever - creasing interest, and now, all modern semiconductor devices undergo at least one plasma-involved processing step, starting from surface cleaning via coating to etching.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9783540858485
  • Indbinding:
  • Hardback
  • Sideantal:
  • 732
  • Udgivet:
  • 30. april 2009
  • Udgave:
  • 2009
  • Størrelse:
  • 234x156x39 mm.
  • Vægt:
  • 2710 g.
  • 8-11 hverdage.
  • 29. november 2024

Normalpris

  • BLACK NOVEMBER

Medlemspris

Prøv i 30 dage for 45 kr.
Herefter fra 79 kr./md. Ingen binding.

Beskrivelse af Low Pressure Plasmas and Microstructuring Technology

Over the last forty years, plasma supported processes have attracted ever - creasing interest, and now, all modern semiconductor devices undergo at least one plasma-involved processing step, starting from surface cleaning via coating to etching.

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