Name: Low Pressure Plasmas and Microstructuring Technology
Price: 2343.95 DKK
Availability: InStock
Author: Gerhard Franz
ISBN: 9783540858485

Low Pressure Plasmas and Microstructuring Technology af Gerhard Franz

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Over the last forty years, plasma supported processes have attracted ever - creasing interest, and now, all modern semiconductor devices undergo at least one plasma-involved processing step, starting from surface cleaning via coating to etching.

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Sprog:
Engelsk

ISBN:
9783540858485

Forlag:
Springer-Verlag Berlin and Heidelberg GmbH & Co. KG

Indbinding:
Hardback

Sideantal:
732

Udgivet:
30. april 2009

Udgave:
2009

Størrelse:
234x156x39 mm.

Vægt:
2710 g.

Leveringstid: 8-11 hverdage.
Forventet levering: 16. januar 2025

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Over the last forty years, plasma supported processes have attracted ever - creasing interest, and now, all modern semiconductor devices undergo at least one plasma-involved processing step, starting from surface cleaning via coating to etching.

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