Name: Low Pressure Plasmas and Microstructuring Technology
Price: 2201.95 DKK
Availability: InStock
Author: Gerhard Franz
ISBN: 9783642099397

Low Pressure Plasmas and Microstructuring Technology af Gerhard Franz

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Over the last forty years, plasma supported processes have attracted ever - creasing interest, and now, all modern semiconductor devices undergo at least one plasma-involved processing step, starting from surface cleaning via coating to etching.

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Sprog:
Engelsk

ISBN:
9783642099397

Forlag:
Springer-Verlag Berlin and Heidelberg GmbH & Co. KG

Indbinding:
Paperback

Sideantal:
732

Udgivet:
19. oktober 2010

Udgave:
12009

Størrelse:
234x156x38 mm.

Vægt:
1139 g.

Leveringstid: 8-11 hverdage.
Forventet levering: 29. november 2024

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Over the last forty years, plasma supported processes have attracted ever - creasing interest, and now, all modern semiconductor devices undergo at least one plasma-involved processing step, starting from surface cleaning via coating to etching.

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