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Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration - Denis Flandre - Bog

Bag om Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration

Co-integration of sensors with their associated electronics on a single silicon chip may provide many significant benefits regarding performance, reliability, miniaturization and process simplicity without significantly increasing the total cost. This title demonstrates the successful co-integration of gas-flow sensors on dielectric membrane.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9780387288420
  • Indbinding:
  • Hardback
  • Sideantal:
  • 292
  • Udgivet:
  • 28. februar 2006
  • Udgave:
  • 2006
  • Størrelse:
  • 235x155x19 mm.
  • Vægt:
  • 1340 g.
  • 8-11 hverdage.
  • 9. december 2024

Normalpris

  • BLACK WEEK

Medlemspris

Prøv i 30 dage for 45 kr.
Herefter fra 79 kr./md. Ingen binding.

Beskrivelse af Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration

Co-integration of sensors with their associated electronics on a single silicon chip may provide many significant benefits regarding performance, reliability, miniaturization and process simplicity without significantly increasing the total cost. This title demonstrates the successful co-integration of gas-flow sensors on dielectric membrane.

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