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Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration - Denis Flandre - Bog

af Denis Flandre, Jean Laconte, Jean-Pierre Raskin
Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration af Denis Flandre
Bag om Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration

Demonstrates the successful co-integration of gas-flow sensors on dielectric membrane, with their associated electronics, in CMOS-SOI technology. This title also focuses on sensors design and characteristics, in which a novel loop-shape polysilicon microheater is designed and built in a CMOS-SOI standard process.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9781441939579
  • Indbinding:
  • Paperback
  • Sideantal:
  • 292
  • Udgivet:
  • 12. februar 2010
  • Udgave:
  • 12006
  • Størrelse:
  • 234x156x16 mm.
  • Vægt:
  • 495 g.
  • 8-11 hverdage.
  • 9. december 2024

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  • BLACK WEEK

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Demonstrates the successful co-integration of gas-flow sensors on dielectric membrane, with their associated electronics, in CMOS-SOI technology. This title also focuses on sensors design and characteristics, in which a novel loop-shape polysilicon microheater is designed and built in a CMOS-SOI standard process.

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