Name: Plasma Charging Damage
Price: 2165.95 DKK
Availability: InStock
Author: Kin P. Cheung
ISBN: 9781447110620

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In the 50 years since the invention of transistor, silicon integrated circuit (IC) technology has made astonishing advances. In state of the art silicon Ie manufacturing process, plasma is used in more than 20 different critical steps.

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Sprog:
Engelsk

ISBN:
9781447110620

Forlag:
Springer London Ltd

Indbinding:
Paperback

Sideantal:
346

Udgivet:
30. august 2012

Udgave:
12001

Størrelse:
157x234x19 mm.

Vægt:
522 g.

Leveringstid: 8-11 hverdage.
Forventet levering: 9. december 2024

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In the 50 years since the invention of transistor, silicon integrated circuit (IC) technology has made astonishing advances. In state of the art silicon Ie manufacturing process, plasma is used in more than 20 different critical steps.

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