Name: Plasma Charging Damage
Price: 2222.95 DKK
Availability: InStock
Author: Kin P. Cheung
ISBN: 9781852331443

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In the 50 years since the invention of transistor, silicon integrated circuit (IC) technology has made astonishing advances. In state of the art silicon Ie manufacturing process, plasma is used in more than 20 different critical steps.

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Sprog:
Engelsk

ISBN:
9781852331443

Forlag:
Springer London Ltd

Indbinding:
Hardback

Sideantal:
346

Udgivet:
4. oktober 2000

Udgave:
2001

Størrelse:
234x156x20 mm.

Vægt:
1510 g.

Leveringstid: 8-11 hverdage.
Forventet levering: 9. december 2024

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In the 50 years since the invention of transistor, silicon integrated circuit (IC) technology has made astonishing advances. In state of the art silicon Ie manufacturing process, plasma is used in more than 20 different critical steps.

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