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Plasma Processing of Semiconductors - P. F. Williams - Bog

Bag om Plasma Processing of Semiconductors

Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9789401064866
  • Indbinding:
  • Paperback
  • Sideantal:
  • 628
  • Udgivet:
  • 12. Oktober 2012
  • Størrelse:
  • 160x34x240 mm.
  • Vægt:
  • 988 g.
  • 2-3 uger.
  • 16. April 2024
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Prøv i 30 dage for 45 kr.
Herefter fra 79 kr./md. Ingen binding.

Beskrivelse af Plasma Processing of Semiconductors

Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications.
Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.

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